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Influence of the silicon concentration on the optical and electrical properties of reactively sputtered Zr–Si–N nanocomposite coatings

✍ Scribed by D. Pilloud; J.F. Pierson; L. Pichon

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
169 KB
Volume
131
Category
Article
ISSN
0921-5107

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We report an investigation concerning the influence of ion bombardment on the nanostructure and physical properties of Zr-Si-N nanocomposite thin films. The films were deposited by reactive magnetron sputtering from individual Zr and Si targets. The Si content was varied by changing the power applie