Influence of the Mobility of Pt Nanoparticles on the Anisotropic Etching Properties of Silicon

✍ Scribed by Li, X.; Xiao, Y.; Yan, C.; Zhou, K.; Schweizer, S. L.; Sprafke, A.; Lee, J.-H.; Wehrspohn, R. B.

• Book ID: 127093695
• Publisher: The Electrochemical Society
• Year: 2012
• Tongue: English
• Weight: 594 KB
• Volume: 2
• Category: Article
• ISSN: 2162-8742
• DOI: 10.1149/2.010302ssl