Influence of the fabrication conditions of polymorphous silicon films on their structural, electrical and optical properties

✍ Scribed by Khenkin, M. V.; Emelyanov, A. V.; Kazanskii, A. G.; Forsh, P. A.; Kashkarov, P. K.; Terukov, E. I.; Orekhov, D. L.; Roca i Cabarrocas, P.

• Book ID: 121368258
• Publisher: Springer
• Year: 2013
• Tongue: English
• Weight: 206 KB
• Volume: 47
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/S1063782613090108