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Influence of target production techniques on target properties, sputtering process and thin films for magnetooptics

✍ Scribed by Schittny, S.U.; Berchtold, L.A.; Bohm, W.; Schultheiss, E.; Wirz, P.

Book ID
114549634
Publisher
IEEE
Year
1988
Tongue
English
Weight
303 KB
Volume
24
Category
Article
ISSN
0018-9464

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