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Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA

✍ Scribed by R. Behrisch; S. Grigull; U. Kreissig; R. Grötzschel

Book ID
114169727
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
436 KB
Volume
136-138
Category
Article
ISSN
0168-583X

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Influence of ion mixing, ion beam-induced roughness and temperature on the depth resolution of sputter depth profiling of metallic bilayer interfaces
✍ Eun-Hee Cirlin; Yang-Tse Cheng; Philip Ireland; Bruce Clemens 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 730 KB

## Abstract To study the factors limiting the depth resolution of sputter depth profiling, we have examined the influence of ion mixing, ion beam‐induced roughness and temperature on the interface resolution of metallic bilayers consisting of Pt on top of Ni or Ti. We studied Pt/Ni and Pt/Ti interf