Influence of substrate temperature on the electrical and optical properties of Ga-doped ZnO thin films fabricated by continuous composition spread
β Scribed by Keun Jung; Won-Kook Choi; Seok-Jin Yoon; Hyun Jae Kim; Ji-Won Choi
- Book ID
- 113529025
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 548 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0272-8842
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
Ga doped ZnO (GZO) thin films were deposited on glass substrates at room temperature by continuous composition spread (CCS) method. CCS is thin films growth method of various Ga x Zn 1-x O(GZO) thin film compositions on a substrate, and evaluating critical properties as a function position, which is
We have fabricated ITO-ZnO composition spread films to investigate the effects of substrate temperature on their electrical and optical properties by using combinatorial RF magnetron sputtering. It turned out by X-ray measurement that the film with zinc contents above 16.0 at% [Zn/(In+Zn+Sn)] showed