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Influence of substrate surface polarity on homoepitaxial growth of ZnO layers by chemical vapor deposition

✍ Scribed by Wagner, Markus R.; Bartel, Til P.; Kirste, Ronny; Hoffmann, Axel; Sann, Joachim; Lautenschläger, Stefan; Meyer, Bruno K.; Kisielowski, C.

Book ID
120464899
Publisher
The American Physical Society
Year
2009
Tongue
English
Weight
458 KB
Volume
79
Category
Article
ISSN
1098-0121

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✍ Chang, Liuwen ;Chou, Mitch M. C. ;Hwang, Teng-Hsing ;Chen, Chun-Wei 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 681 KB

## Abstract Low lattice‐mismatched γ‐LiAlO~2~(100) substrates were employed to grow ZnO epitaxial films by chemical vapor deposition. The influence of growth temperature on growth behavior of ZnO was investigated. Results indicated that the low lattice‐matched (10$ \bar 1 $0) crystallites nucleate