Growth of Polycrystalline GaN on Silicon (001) Substrates by RF Plasma Chemical Vapor Deposition with ZnO Buffer Layer

✍ Scribed by Park, D. C. ;Fujita, Sz. ;Fujita, Sg.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 130 KB
• Volume: 176
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199911)176:1<579::aid-pssa579>3.0.co;2-n