✦ LIBER ✦

Influence of Substrate Nature on the Microstructure of LPCVD Silicon Films

✍ Scribed by B. Caussat; J. P. Couderc; E. Scheid; C. Bourgerette; B. de Mauduit

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of excess silicon on behavior of

✍ R.V. Joshi; Y.H. Kim; J.T. Wetzel; T. Lin 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 479 KB

Influence of substrate on the microstruc

✍ J Bailat; E Vallat-Sauvain; L Feitknecht; C Droz; A Shah 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 176 KB

Structure and Properties of LPCVD Silico

✍ Kamins, T. I. 📂 Article 📅 1980 🏛 The Electrochemical Society 🌐 English ⚖ 670 KB

Influence of substrate texture on micros

✍ Takuya Matsui; Masaharu Tsukiji; Hiroyuki Saika; Toshihiko Toyama; Hiroaki Okamo 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 159 KB

Influence of the substrate nature on the

✍ Popov, C.; Bliznakov, S.; Kulisch, W. 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 254 KB

Characterization of the microstructure o

✍ Z. L. Zhang; Z. G. Xiao; X. B. Wu; Z. S. Yu 📂 Article 📅 2000 🏛 Springer US 🌐 English ⚖ 816 KB