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Structure and Properties of LPCVD Silicon Films

✍ Scribed by Kamins, T. I.

Book ID: 124086588
Publisher: The Electrochemical Society
Year: 1980
Tongue: English
Weight: 670 KB
Volume: 127
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2129733

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