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Influence of substrate biasing on the growth of c-axis oriented AlN thin films by RF reactive sputtering in pure nitrogen

✍ Scribed by L. Monteagudo-Lerma; F. B. Naranjo; M. González-Herráez; S. Fernández

Book ID: 112182201
Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 375 KB
Volume: 9
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.201100196

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