Influence of sputtering pressure on morphological, mechanical and electrical properties of Al-doped ZnO films

✍ Scribed by J.P. Kar; S. Kim; B. Shin; K.I. Park; K.J. Ahn; W. Lee; J.H. Cho; J.M. Myoung

• Book ID: 108271818
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 787 KB
• Volume: 54
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/j.sse.2010.07.002