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Dependence of the properties of sputter deposited Al-doped ZnO thin films on base pressure

✍ Scribed by Deok-Kyu Kim; Hong-Bae Kim

Book ID: 116609097
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 749 KB
Volume: 522
Category: Article
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2012.01.078

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