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Studies on the properties of sputter-deposited Sc-doped ZnO thin film

โœ Scribed by Cunxing Miao; Zhanxia Zhao; Xiaomin Ma; Zhongquan Ma

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
595 KB
Volume
405
Category
Article
ISSN
0921-4526

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Effect of magnesium doping on the struct
Effect of magnesium doping on the structural and piezoelectric properties of sputtered ZnO thin film
โœ Walter Water; Yin-Shiang Yan; Teen-Hang Meen ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 504 KB

Structural and piezoelectric characteristics of magnesium-doped ZnO films were investigated. Magnesium-doped ZnO films with a c-axis preferred orientation were deposited on ST-cut quartz by radio frequency magnetron sputtering. The crystalline structure and surface morphology of films were studied b