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Influence of substrate temperature on mechanical, optical and electrical properties of ZnO:Al films

✍ Scribed by Ruitao Wen; Laisen Wang; Xuan Wang; Guang-Hui Yue; Yuanzhi Chen; Dong-Liang Peng

Book ID
116607405
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
763 KB
Volume
508
Category
Article
ISSN
0925-8388

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of