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Dependence of electrical and optical properties of ZnO films on substrate temperature

✍ Scribed by X.L. Xu; S.P. Lau; J.S. Chen; Z. Sun; B.K. Tay; J.W. Chai

Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
186 KB
Volume
4
Category
Article
ISSN
1369-8001

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of