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Electrical and optical properties of pyrolytically sprayed SnO2 film—Dependence on substrate temperature and substrate-nozzle distance

✍ Scribed by V. Vasu; A. Subrahmanyam


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
480 KB
Volume
189
Category
Article
ISSN
0040-6090

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of