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The influence of substrate and annealing temperatures on electrical properties of p-type ZnO films

✍ Scribed by C.Y. Zhang

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 654 KB
Volume: 404
Category: Article
ISSN: 0921-4526
DOI: 10.1016/j.physb.2008.10.034

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of