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Influence of sputtering parameters on microstructure and morphology of TiO2 thin films

✍ Scribed by Seon-Hwa Kim; Yong-Lak Choi; Yo-Seung Song; Deuk Yong Lee; Se-Jong Lee


Book ID
117357058
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
486 KB
Volume
57
Category
Article
ISSN
0167-577X

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