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Influence of sputtering parameters on microstructure and mechanical properties of GeSbTe films

✍ Scribed by Yong-zhong FU

Book ID: 117693504
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 328 KB
Volume: 18
Category: Article
ISSN: 1003-6326
DOI: 10.1016/s1003-6326(08)60030-8

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