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Influence of silicon orientation and cantilever undercut on the determination of the Young’s modulus of thin films

✍ Scribed by H. Nazeer; L.A. Woldering; L. Abelmann; M.D. Nguyen; G. Rijnders; M.C. Elwenspoek

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
370 KB
Volume
88
Category
Article
ISSN
0167-9317

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