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Influence of self-assembly monolayers on the characteristics of copper phthalacyanine thin film transistor

โœ Scribed by K. Xiao; Y. Liu; Y. Guo; G. Yu; L. Wan; D. Zhu


Book ID
106019097
Publisher
Springer
Year
2003
Tongue
English
Weight
692 KB
Volume
80
Category
Article
ISSN
1432-0630

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## Abstract Selfโ€assembled monolayers (SAM's) of (3โ€Mercaptopropyl)trimethoxysilane (MPTMS) were applied on Si (100) wafers covered either with lowโ€temperature silicon oxide (LTO) or with SiLK^ยฎ^. Cu films were subsequently chemically vapor deposited (CVD) on the MPTMS SAMs with a novel reactor equ