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Deposition mechanism of oxide thin films on self-assembled organic monolayers

✍ Scribed by H. Shin; M. Agarwal; M.R. De Guire; A.H. Heuer

Book ID
108492134
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
665 KB
Volume
46
Category
Article
ISSN
1359-6454

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We demonstrate the deposition of Al x O y H z onto hydroxy-terminated self-assembled monolayers. The layer structure is investigated by Fourier transform infrared (FTIR) spectroscopy, spontaneous desorption time-of-flight mass spectrometry, and surface plasmon spectroscopy. It is found that the orga