✦ LIBER ✦

Influence of resists on reactive ion etching

✍ Scribed by Zdeněk Novotný

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reactive ion etching of silicon

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 164 KB

Reactive ion etching and plasma etching

✍ P. Verdonck; G. Brasseur; J. Swart 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 313 KB

Reactive ion etching of gallium arsenide

✍ A.P. Avtiushkov; V.A. Labunov; A.F. Stekolnikov 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 366 KB

Reactive ion etching of crystalline quar

✍ P. Danesh; B.G. Pantchev 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 156 KB

Deep reactive ion etching of PMMA

✍ Congchun Zhang; Chunsheng Yang; Duifu Ding 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 205 KB

Reactive ion etching of ion-plated carbo

✍ K Popova 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 420 KB