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Deep reactive ion etching of PMMA

✍ Scribed by Congchun Zhang; Chunsheng Yang; Duifu Ding

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 205 KB
Volume: 227
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2003.11.050

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