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Influence of processing and annealing steps on electrical properties of InAlN/GaN high electron mobility transistor with Al2O3 gate insulation and passivation

✍ Scribed by K. Čičo; D. Gregušová; J. Kuzmík; M. Jurkovič; A. Alexewicz; M.-A. di Forte Poisson; D. Pogany; G. Strasser; S. Delage; K. Fröhlich


Book ID
113916067
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
562 KB
Volume
67
Category
Article
ISSN
0038-1101

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## Abstract We investigated low‐frequency noise in passivated and nonpassivated AlGaN/GaN high electron mobility transistor (HEMT) heterostructures grown on SiC substrate. The heterostructure layers are grown without intentionally doping the barrier material and two‐dimensional gas appears at the i