Influence of process parameters on the structure and the properties of ZrO2 coatings deposited by reactive pulsed magnetron sputtering (PMS)

✍ Scribed by Klaus Goedicke; Jörn-Steffen Liebig; Olaf Zywitzki; Hagen Sahm

• Book ID: 114085305
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 347 KB
• Volume: 377-378
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(00)01381-x