Influence of plasma treatments on the properties of GaN/AlGaN/GaN HEMT structures

✍ Scribed by Stefanie Linkohr; Wilfried Pletschen; Vladimir Polyakov; Marcel Himmerlich; Pierre Lorenz; Stefan Krischok; Lutz Kirste; Stefan Müller; Oliver Ambacher; Volker Cimalla

• Book ID: 112182209
• Publisher: John Wiley and Sons
• Year: 2012
• Tongue: English
• Weight: 340 KB
• Volume: 9
• Category: Article
• ISSN: 1862-6351
• DOI: 10.1002/pssc.201100210