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Influence of oxygen precipitates on the warpage of annealed silicon wafers

✍ Scribed by Deren Yang; Gan Wang; Jin Xu; Dongsheng Li; Duanlin Que; C. Funke; H.J. Moeller

Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
292 KB
Volume
66
Category
Article
ISSN
0167-9317

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