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Influence of oxygen on the formation of cubic boron nitride by r.f. magnetron sputtering

✍ Scribed by Gang Qi; Yong-Kang Le

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
160 KB
Volume
256
Category
Article
ISSN
0169-4332

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Thin films of cubic boron nitride (c-BN) can be produced by various PVD and PECVD techniques under several prerequisites referring reportedly to the growth temperature, stoichiometry of the deposited films, and energy impact of the growing surface during film deposition. For reactive magnetron-sputt