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Influence of nitrogen doping on thermal stability of fluorinated amorphous carbon thin films

✍ Scribed by Xiong-fei LIU; Xin ZHOU; Jin-ding GAO

Book ID: 117692954
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 716 KB
Volume: 16
Category: Article
ISSN: 1003-6326
DOI: 10.1016/s1003-6326(06)60010-1

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