✦ LIBER ✦

Temperature stability of fluorinated amorphous hydrogenated carbon films

✍ Scribed by U. Müller; R. Hauert; B. Oral; M. Tobler

Book ID: 107930453
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 445 KB
Volume: 76-77
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)02560-x

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Fluorine-containing amorphous hydrogenat

Fluorine-containing amorphous hydrogenated carbon films

✍ Steven F. Durrant; Richard Landers; George G. Kleiman; Sandra G. Castro; Mário A 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 392 KB

Amorphous hydrogenated carbon films on s

Amorphous hydrogenated carbon films on semiconductors

✍ D. Ugolini; J. Eitle; P. Oelhafen; M. Wittmer 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 863 KB

Photoelectrochemical characterization of

Photoelectrochemical characterization of amorphous hydrogenated carbon films

✍ A.Ya. Sakharova; Yu.V. Pleskov; F.Di Quarto; S. Piazza; C. Sunseri; S.S. Gerasim 📂 Article 📅 1995 🏛 Elsevier 🌐 English ⚖ 666 KB

Temperature dependence of electron spin

Temperature dependence of electron spin resonance in fluorinated amorphous carbon films

✍ Haruo Yokomichi; Kazuo Morigaki 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 157 KB

Preparation of fluorinated amorphous car

Preparation of fluorinated amorphous carbon thin films

✍ Haruo Yokomichi; Tohru Hayashi; Tomihiro Amano; Atsushi Masuda 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 146 KB

Deposition temperature effect on thermal

Deposition temperature effect on thermal stability of fluorinated amorphous carbon films utilized as low-K dielectrics

✍ N. Ariel; M. Eizenberg; Y. Wang; S.P. Murarka 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 251 KB

Fluorinated amorphous carbon films (a-F : C) were deposited by high-density plasma-chemical vapor deposition (HDP-CVD) using C 4 F 8 and CH 4 as precursors. The deposition process was performed at two temperatures: $200 and $3508C. In order to study the thermal stability of the films, the samples we