✦ LIBER ✦

Influence of negative substrate bias voltage on the impurity concentrations in Zr films

✍ Scribed by J.-W. Lim; J.W. Bae; K. Mimura; M. Isshiki

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Influence of negative bias voltage on th

✍ Wenlong Song; Jianxin Deng; Pei Yan; Ze Wu; Hui Zhang; Jun Zhao; Xing Ai 📂 Article 📅 2011 🏛 Wuhan University of Technology 🌐 English ⚖ 461 KB

Precise impurity analysis of Cu films by

✍ J.W. Lim; K. Mimura; M. Isshiki 📂 Article 📅 2005 🏛 Springer 🌐 English ⚖ 138 KB

Influence of substrate bias voltage on t

✍ A. Sivasankar Reddy; G. Venkata Rao; S. Uthanna; P. Sreedhara Reddy 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 260 KB

Effect of substrate bias voltages on the

✍ Ying Wang; Chunhui Zhao; Zhongxiao Song; Fei Cao; Dawei Yang 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 204 KB

Preparation of ZrO2dielectric layers by

✍ Joon Woo Bae; Jae-Won Lim; Sun Joong Kim; Kouji Mimura; Takamichi Miyazaki; Masa 📂 Article 📅 2010 🏛 TechnoPress 🌐 English ⚖ 1007 KB

The Effect of Negative Bias Voltage on P

✍ Qinyu, Yang; Dexin, Wang; Ke, Ding; Jing, Zhang; Qingrui, Wang 📂 Article 📅 2011 🏛 Taylor and Francis Group 🌐 English ⚖ 493 KB