Preparation of ZrO2dielectric layers by subsequent oxidation after Zr film deposition with negative substrate bias voltage

✍ Scribed by Joon Woo Bae; Jae-Won Lim; Sun Joong Kim; Kouji Mimura; Takamichi Miyazaki; Masahito Uchikoshi; Minoru Isshiki

• Book ID: 107662055
• Publisher: TechnoPress
• Year: 2010
• Tongue: English
• Weight: 1007 KB
• Volume: 16
• Category: Article
• ISSN: 1598-9623
• DOI: 10.1007/s12540-010-0615-5