✦ LIBER ✦
Precise impurity analysis of Cu films by GDMS: relation between negative substrate bias voltage and impurity ionization potentials
✍ Scribed by J.W. Lim; K. Mimura; M. Isshiki
- Book ID
- 111707036
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 138 KB
- Volume
- 80
- Category
- Article
- ISSN
- 1432-0630
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