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Influence of impurities on ion beam induced TiSi2 formation

✍ Scribed by C. Dehm; B. Raum; I. Kasko; H. Ryssel

Book ID: 113283486
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 311 KB
Volume: 80-81
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)90676-w

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