Formation of TiSi2 and shallow junction by As+ ion beam mixing and infrared rapid heat treatment

✍ Scribed by Ye Min; Lin Huiwang; Fei Guifu; Tsien Peihsin; Zhang Jingping; Yin Shiduan

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 318 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90205-4