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Influence of implantation energy on the characteristics of Mn-implanted nonpolar a-plane GaN films

✍ Scribed by Lili Sun; Fawang Yan; Junxi Wang; Huixiao Zhang; Yiping Zeng; Guohong Wang; Jinmin Li

Book ID
113792543
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
541 KB
Volume
63
Category
Article
ISSN
0167-577X

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The structural, morphological and magnet
The structural, morphological and magnetic characteristics of Mn-implanted nonpolara-plane GaN films
✍ Sun, Lili ;Yan, Fawang ;Wang, Junxi ;Zeng, Yiping ;Wang, Guohong ;Li, Jinmin πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 219 KB

## Abstract Dilute magnetic nonpolar GaN films have been fabricated by implanting Mn into unintentionally doped nonpolar __a__ ‐plane GaN films at room temperature, and a subsequent rapid thermal annealing. The X‐ray diffraction analysis shows that after rapid thermal annealing the peak of the GaN