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The structure, morphology and Raman scattering study on Mn-implanted nonpolar a-plane GaN films

✍ Scribed by Lili Sun; Fawang Yan; Huixiao Zhang; Junxi Wang; Yiping Zeng; Guohong Wang; Jinmin Li

Book ID: 108215656
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 723 KB
Volume: 162
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2009.04.009

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## Abstract Dilute magnetic nonpolar GaN films have been fabricated by implanting Mn into unintentionally doped nonpolar __a__ ‐plane GaN films at room temperature, and a subsequent rapid thermal annealing. The X‐ray diffraction analysis shows that after rapid thermal annealing the peak of the GaN