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Influence of hydrogen and oxygen on the melt properties and the crystal growth in silicon

✍ Scribed by Atsushi Ikari; Hitoshi Sasaki; Eiji Tokizaki; Kazutaka Terashima; Shigeyuki Kimura


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
246 KB
Volume
36
Category
Article
ISSN
0921-5107

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