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Influence of hot filaments arranging on substrate temperature during HFCVD of diamond films

✍ Scribed by G.H Song; J.H Yoon; H.S Kim; C Sun; R.F Huang; L.S Wen


Book ID
117356942
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
212 KB
Volume
56
Category
Article
ISSN
0167-577X

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