Influence of substrate temperature on formation of ultrananocrystalline diamond films deposited by HFCVD argon-rich gas mixture

✍ Scribed by Barbosa, D.C.; Almeida, F.A.; Silva, R.F.; Ferreira, N.G.; Trava-Airoldi, V.J.; Corat, E.J.

• Book ID: 121386036
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 536 KB
• Volume: 18
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2009.05.002