Adsorption action of methylene CH2 during diamond film growth on (100) surface by hot filament chemical vapor deposition (HFCVD)

✍ Scribed by K.A. Feng; Z.D. Lin

• Book ID: 111708870
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 450 KB
• Volume: 55
• Category: Article
• ISSN: 0022-3697
• DOI: 10.1016/0022-3697(94)90159-7