## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of
Influence of high-pressure hydrogen treatment on structural and electrical properties of ZnO thin films
โ Scribed by Chunye Li; Hongwei Liang; Jianze Zhao; Qiuju Feng; Jiming Bian; Yang liu; Rensheng Shen; Wangcheng Li; Guoguang Wu; G.T. Du
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 847 KB
- Volume
- 256
- Category
- Article
- ISSN
- 0169-4332
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โฆ Synopsis
a b s t r a c t ZnO thin films were treated by high-pressure hydrogen (H 2 ). Scanning electron microscope (SEM) images show that the surface morphology of ZnO films has been changed significantly by H 2 treatment. X-ray diffraction patterns show that the Zn(OH) 2 phases formed after H 2 treatment. The X-ray photoelectron spectroscopy results indicate that H atoms were doped into the surface of ZnO by forming H-O-Zn bond.
The phenomenon shows that it is easy to form O-H bond in ZnO rather than H interstitial atom under high-pressure hydrogen circumstance.
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