✦ LIBER ✦

Influence of gas residence time on the deposition of nitrogen-rich amorphous silicon nitride

✍ Scribed by D.T. Murley; R.A.G. Gibson; B. Dunnett; A. Goodyear; I.D. French

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The effect of hydrogen dilution on the a

✍ Darren Murley; Ian French; Steven Deane; Roderick Gibson 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 324 KB

Studies of the deposition of high qualit

✍ Z. Yin; F.W. Smith 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 266 KB

Microscopic origin of the light-induced

✍ J. Kanicki; W.L. Warren; C.H. Seager; M.S. Crowder; P.M. Lenahan 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 336 KB

The influence of hydrogen gas on the cha

✍ J.T. Lue; O. Meyer; J. Lombaard; R.H. Wang 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 409 KB

Dependence of thin film transistor chara

✍ Miyashita, H.; Watabe, Y. 📂 Article 📅 1994 🏛 IEEE 🌐 English ⚖ 486 KB

The effects of thermal diffusion of nitr

✍ Heung Kim; Chong Hee Kim 📂 Article 📅 1984 🏛 Springer 🌐 English ⚖ 161 KB