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Influence of film structure on the electron energy loss spectra of GaAs thin films

✍ Scribed by Dr. H. Boudriot; Dr. B. Kubier; K. Deus; Dr. R. Gründler; Dr. E. Kusior

Publisher
John Wiley and Sons
Year
1983
Tongue
English
Weight
573 KB
Volume
18
Category
Article
ISSN
0232-1300

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✦ Synopsis

Influence of Film Structure on the Electron Energy Loss Spectra of GaAs Thin Films

Energy loss nieasurements of fast electrons on GaAs yielded values for the plasma 0scillation, interband transitions and the dielectric function in the region 5 -30 ev. The results are discussed in comparison with literature statements. It is dealt especially with the influence of the degree of crystallinity of examined GaAs-films on the energy loss spectrum and the quantities derived from it.

Energieverlustmessungon schneller Elektronen an GaAs lieferten Daten fur die Plasmaschwingung, Interbandubergiinge und die dielektrische Funktion im Bereich 5 -30 eV. Die Resultate werden im Vergleich niit Literaturangaben diskutiert. Besonders wird eingegangen auf den EinfluR des Kristallinitiitsgrades der untersuchten GaAs-Schichten auf das Energieverlustspektrum sowie die daraus abgeleiteten GroRen.

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