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Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition

✍ Scribed by Fei Zhou; Koshi Adachi; Koji Kato


Book ID
108289207
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
197 KB
Volume
497
Category
Article
ISSN
0040-6090

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Carbon nitride thin films may become good competitors for diamond-like carbon, due to their high hardness, high wear resistance, and low friction coefficient. At present, there are only a few studies of the effect of CNx coating hardness and internal stress on its tribological properties, such as co