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Influence of chlorine implantation on phosphorus diffusivity and oxidation-induced defects in silicon

✍ Scribed by Armigliato, A. ;Solmi, S. ;Donolato, C. ;Negrini, P. ;Gabilli, E. ;Garulli, A. ;Kittler, M.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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Effect of Chlorine Implantation on Phosp

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Dependence of anomalous phosphorus diffu

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