Influence of barrier and cap layer deposition on the properties of capped and non-capped porous silicon oxide

✍ Scribed by S.E Schulz; H Koerner; C Murray; I Streiter; T Gessner

• Book ID: 108411135
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 617 KB
• Volume: 55
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(00)00427-5