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Influence of argon and hydrogen ions energy on the structure of a-Si:H prepared by ion-beam-assisted evaporation

✍ Scribed by H. Rinnert; M. Vergnat; G. Marchal; A. Burneau

Book ID: 114170555
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 136 KB
Volume: 147
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00583-7

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